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Inverse Problems
| Speaker: |
Marc Noot
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| Date: |
Wednesday June 20, 2007 |
| Title: |
Inverse Scatterometry
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Abstract
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In the STARS Software Subcontracting
project CASA has developed a simulation tool for ASML to reconstruct
the geometry of gratings and the grating's optical properties based on
a captured CCD image. The basic ingredients are the RCWA algorithm
(forward solver) and a Gauss-Newton inverse solver (nonlinear
optimizer). Since performance is critical special attention has been
paid to parallel computing and an efficient implementation of the RCWA
algorithm. In order to speed-up convergence a library with initial
guesses is computed offline which is consulted in the online
reconstruction phase.
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